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Process Safety in the Semiconductor Industry

Risk mitigation and prevention in semiconductor R&D and manufacturing

As in every process and manufacturing industry, process safety in the fast-evolving semiconductor sector requires evaluation of all credible hazards to ensure safe operations. We support and inform semiconductor manufacturers in ensuring safety standards and preventing hazards to people and the environment.

Process Safety in the Semiconductor Industry
Process Safety in the Semiconductor Industry

Semiconductor manufacturing faces particular challenges as it seeks to maintain safety standards and minimize human and environmental harm. Because its processes often involve the use of highly flammable, pyrophoric, and water-reactive chemicals in exothermic reactions, special attention to safe handling must be paid.

Whether in semiconductor manufacturing or R&D, some process chemicals produce extremely dangerous by-products, posing yet another concern. While the hazardous properties of commonly used chemicals are well documented, innovation frequently leads to the use of new chemicals with unknown characteristics. Strict product development timelines and fierce competition further complicate potential risks.

Your Benefits

  • Fire and explosion prevention
  • Safe manufacturing facilities
  • Improvement of personal safety
  • Compliance with applicate codes and standards

Process Safety in the Semiconductor Industry – DEKRA

Our Approach

In order to obtain relevant process safety data and to ensure a safe manufacturing environment, we provide you with the following specialist laboratory and full-scale testing services for chemical materials:

  • Flash point
  • Autoignition temperature
  • Temperature limits of flammability
  • Limits of flammability (lower and upper flammability limits) in air
  • Limiting oxidant concentration (LOC)
  • Conductivity
  • Vapor pressure
  • Boiling point
  • Melting point

  • Modified flash point in a dry, H2O-free atmosphere
  • Limits of flammability at elevated temperatures and/or pressures
  • Limits of flammability in alternate oxidizers such as O2, N2O, Cl2, and F2
  • Limiting oxidant concentration (LOC) at elevated temperatures and/or pressures
  • Limiting oxidant concentration with alternate oxidizers such as O2, N2O, Cl2, and F2
  • Autoignition temperature at elevated pressure
  • Chemical compatibility testing in simulated process gases, including O2, N2O, NF3, Cl2, F2 and NH3
  • Customized, large-scale testing

  • Dangerous when wet test
  • Skin corrosivity test
  • Solid and liquid oxidizing substances tests
  • Adiabatic storage test
  • Shock test
  • Sustained combustibility test
  • Pyrophoric solids and liquids tests
  • Self-heating substances test

  • Differential scanning calorimetry (DSC)
  • Reaction calorimetry (RC-1)
  • Accelerated rate calorimetry (ARC)
  • Vent sizing package (VSP)
  • Adiabatic pressure Dewar calorimetry
  • Carious tube
  • Thermal stability

Trained and qualified staff is yet another vital part of safe semiconductor manufacturing. We recognize that safe operations can only be achieved with a thorough understanding of all chemical process materials and their by-products. Our experts have extensive experience in providing full-scale testing of materials involved in semiconductor manufacturing. This includes ASTM standard tests, such as temperature limits of flammability as well as specialized testing of new and evolving chemicals. We provide additional support in transportation and exothermic chemical reaction testing to ensure safe operation and up-scaling of your chemical processes.


  • We prepare technical and operating personnel for the safe handling and processing of energetic materials in the semiconductor industry.
  • We offer on-site audits of your production facilities in addition to laboratory testing services to ensure compliance with applicable national and local regulations.
  • We specify safety-related devices of the production equipment, such as emergency vents.
  • We ensure that protective measures such as mechanical mechanisms, gas detectors, or alarms are appropriate and proportionate to the degree of hazard in your facility.

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